Title :
A semiconductor laser suitably fabricated by planar technology
Author :
Huang, Yong-Zhen ; Guo, Wei-Hua ; Yu, Li-Juan
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Abstract :
The semiconductor microlasers with an equilateral triangle resonator (ETR), which can be fabricated by dry etching technique from the laser wafer of the edge emitting laser, are analyzed by FDTD technique and rate equations. The results show that ETR microlaser is suitable to realize single mode operation. By connecting an output waveguide to one of the vertices of the ETR, we still can get the confined modes with high quality factors. The ETR microlasers are potential light sources for photonic integrated circuits.
Keywords :
Q-factor; finite difference time-domain analysis; laser cavity resonators; laser modes; semiconductor lasers; sputter etching; FDTD technique; dry etching; edge emitting laser; equilateral triangle resonator; light source; mode confinement; output waveguide; photonic integrated circuit; planar technology; quality factor; rate equation; semiconductor microlaser; single mode operation; Dry etching; Equations; Finite difference methods; Joining processes; Laser modes; Q factor; Semiconductor lasers; Semiconductor waveguides; Time domain analysis; Waveguide lasers;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982123
