Title :
An information retrieval system for the analysis of systematic defects in VLSI
Author :
Maynard, D. ; Zhong, Sheng
Abstract :
This work presents a novel information retrieval (IR) tool, designed to help VLSI defect and yield engineers identify potentially defective layout regions. Given a query defect pattern discovered in a manufacturing process, this tool can be used to return similar layout regions in one or more designs ranked by similarity to the query pattern. Defect engineers can then examine these regions in hardware for presence of defects to analyze the cause of the failure. Detailed design considerations, such as feature extraction and clustered search, as well as some real-world search results, are presented and discussed.
Keywords :
VLSI; data mining; feature extraction; information retrieval systems; manufacturing processes; pattern clustering; query formulation; semiconductor device manufacture; VLSI; feature extraction; information retrieval system; manufacturing process; query defect pattern discover; Chemical processes; Design engineering; Failure analysis; Information analysis; Information retrieval; Manufacturing processes; Optical sensors; Pattern recognition; Shape; Very large scale integration;
Conference_Titel :
Tools with Artificial Intelligence, 2004. ICTAI 2004. 16th IEEE International Conference on
Print_ISBN :
0-7695-2236-X
DOI :
10.1109/ICTAI.2004.31