• DocumentCode
    2220386
  • Title

    An information retrieval system for the analysis of systematic defects in VLSI

  • Author

    Maynard, D. ; Zhong, Sheng

  • fYear
    2004
  • fDate
    15-17 Nov. 2004
  • Firstpage
    216
  • Lastpage
    223
  • Abstract
    This work presents a novel information retrieval (IR) tool, designed to help VLSI defect and yield engineers identify potentially defective layout regions. Given a query defect pattern discovered in a manufacturing process, this tool can be used to return similar layout regions in one or more designs ranked by similarity to the query pattern. Defect engineers can then examine these regions in hardware for presence of defects to analyze the cause of the failure. Detailed design considerations, such as feature extraction and clustered search, as well as some real-world search results, are presented and discussed.
  • Keywords
    VLSI; data mining; feature extraction; information retrieval systems; manufacturing processes; pattern clustering; query formulation; semiconductor device manufacture; VLSI; feature extraction; information retrieval system; manufacturing process; query defect pattern discover; Chemical processes; Design engineering; Failure analysis; Information analysis; Information retrieval; Manufacturing processes; Optical sensors; Pattern recognition; Shape; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Tools with Artificial Intelligence, 2004. ICTAI 2004. 16th IEEE International Conference on
  • ISSN
    1082-3409
  • Print_ISBN
    0-7695-2236-X
  • Type

    conf

  • DOI
    10.1109/ICTAI.2004.31
  • Filename
    1374190