High Energy Laser Pulse Irradiation of a Silica Microsphere on a Glass Surface for Sub-micron Patterning

Irradiating silica microspheres, on a silica or glass surface, with single, high-energy, laser pulses from a KrF excimer laser, has generated a wealth of different micron and sub-micron, topological patterns in the substrate. Optical surface profilometry has been used as the experimental technique to study the patterns formed. Comparison of the experimental results with theoretical results from sophisticated models developed by Lukyanchuk and co-workers, and Arnold and co-workers is presented.