UHV/CVD self-organized growth of Ge quantum dots

Ge quantum dots were self-organized grown using a UHV/CVD system. The results show that the scale, morphology and distribution of the quantum dots were greatly influenced by the growth temperature. Ge quantum dots grown at 550°C and 600°C show two typical scales, distributed uniformly, and the density of the quantum dots is higher than 10¹⁰/cm². The bottom diameter of the bigger quantum dots grown at 550°C was about 80 nm, while the smaller 45 nm. The scales of the quantum dots grown at 700°C were obviously bigger with a worse uniformity.