Ion transport mechanisms in a filtered cathodic vacuum arc (FCVA) system

Plasma floating potential, ion current and deposition rate spatial profiles in the quarter torus magnetic filter of an FCVA system were measured. The results show that the shape of the ion beam profile at the filter exit depends on the trajectories through the filter of the field lines intersecting the plasma generation region. Although the plasma density scales linearly with magnetic field strength, the shape of the beam´s profile was unaffected by field strength in each of the magnetic field configurations studied. The magnetic mirror effect, electron diffusion and ion inertial drift were identified as the dominant plasma loss mechanisms. These results can be used to design optimal filter systems and to tailor deposition rate profiles to the requirements of a given coating process