Title :
Influence of method of excitation on the characteristics of low pressure plasma high frequency discharge
Author :
Berkin, A.B. ; Buchalov, A.A.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
The influence of a technique of excitation of HF discharge on size of power density in plasma is investigated. The following variants of excitation of the discharge are considered: the high frequency induction discharge (HFID), electrodeless HF capacitor discharge (EHFCD) and mixed variant HFI-EHFC with variable capacity of the discharge
Keywords :
gas-discharge tubes; high-frequency discharges; space charge; electrodeless HF capacitor discharge; high frequency discharge; high frequency induction discharge; low pressure plasma; mixed variant HFI-EHFC; power density; variable capacity; Capacitors; Electrons; Frequency; Hafnium; Plasma density; Plasma measurements; Plasma properties; Spontaneous emission; Tellurium; Voltage;
Conference_Titel :
Microwave Electronics: Measurements, Identification, Application Conference, 2001. MEMIA 2001
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-6743-X
DOI :
10.1109/MEMIA.2001.982340
