DocumentCode
2222172
Title
Influence of method of excitation on the characteristics of low pressure plasma high frequency discharge
Author
Berkin, A.B. ; Buchalov, A.A.
Author_Institution
Novosibirsk State Tech. Univ., Russia
fYear
2001
fDate
2001
Firstpage
151
Lastpage
155
Abstract
The influence of a technique of excitation of HF discharge on size of power density in plasma is investigated. The following variants of excitation of the discharge are considered: the high frequency induction discharge (HFID), electrodeless HF capacitor discharge (EHFCD) and mixed variant HFI-EHFC with variable capacity of the discharge
Keywords
gas-discharge tubes; high-frequency discharges; space charge; electrodeless HF capacitor discharge; high frequency discharge; high frequency induction discharge; low pressure plasma; mixed variant HFI-EHFC; power density; variable capacity; Capacitors; Electrons; Frequency; Hafnium; Plasma density; Plasma measurements; Plasma properties; Spontaneous emission; Tellurium; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Electronics: Measurements, Identification, Application Conference, 2001. MEMIA 2001
Conference_Location
Novosibirsk
Print_ISBN
0-7803-6743-X
Type
conf
DOI
10.1109/MEMIA.2001.982340
Filename
982340
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