DocumentCode
2223210
Title
45 MeV linac for the 800 MeV synchrotron radiation light source
Author
Kaneko, N. ; Yamamoto, M. ; Azuma, O. ; Iwata, H. ; Nakashizu, T. ; Hoshi, Y.
Author_Institution
Ishikawajima-harima Heavy Ind. Co. Ltd., Tokyo, Japan
fYear
1991
fDate
6-9 May 1991
Firstpage
2990
Abstract
A 45-MeV linac has been developed by Ishikawajima-harima Heavy Industries Co. Ltd. (IHI) as an injector of the compact synchrotron radiation light source. The construction of the SR system, called LUNA, was completed in 1989 at the Tsuchiura facility of IHI. Now several experiments for X-ray lithography are in progress. The linac has been operated successfully. Detailed descriptions of the linac and its beam performance are given.<>
Keywords
electron accelerators; linear accelerators; LUNA; X-ray lithography; compact synchrotron radiation light source; linac; linear accelerators; Acceleration; Costs; Electrons; Klystrons; Light sources; Linear particle accelerator; Monitoring; Radio frequency; Synchrotron radiation; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Particle Accelerator Conference, 1991. Accelerator Science and Technology., Conference Record of the 1991 IEEE
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-0135-8
Type
conf
DOI
10.1109/PAC.1991.165164
Filename
165164
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