SEM Characterization of Nanodevices and Nanomaterials

Author

Drouin, Dominique ; Pauc, Nicolas ; Phillips, Matthew ; Poissant, Patrick ; Delample, Vincent ; Souifi, Abdelkader ; Aimez, Vincent ; Beauvais, Jacques

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. de Sherbrooke, Que.

fYear

2006

fDate

3-7 July 2006

Abstract

The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization

Keywords

nanoelectronics; nanostructured materials; scanning electron microscopy; SEM; cathodoluminescence; charge collection; nanodevices characterization; nanofabrication process development; nanomaterials characterization; scanning electron microscope; secondary electron imaging; voltage contrast; Atomic force microscopy; Electrodes; Gallium nitride; Instruments; Nanomaterials; Nanoscale devices; Optical imaging; Plasma measurements; Scanning electron microscopy; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoscience and Nanotechnology, 2006. ICONN '06. International Conference on

Conference_Location

Brisbane, Qld.

Print_ISBN

1-4244-0453-3

Electronic_ISBN

1-4244-0453-3

Type

conf

DOI

10.1109/ICONN.2006.340688

Filename

4143468