DocumentCode
2224713
Title
Fabrication of transparent electrodes from AZO nanoparticles by pulsed laser annealing
Author
Chen, Kun-Tso ; Lin, Yu-Hsuan ; Ho, Jeng-Rong ; Liu, Sung-Ho ; Chen, Chun-Ming
Author_Institution
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
We report on an approach for fabricating transparent electrodes on a plastic substrate by annealing AZO nanoparticles using a pulsed UV laser. For the resulting AZO film, the resistivity is 7.6 × 10-2 Ω-cm and the transmittance is over 80% within the wavelength from 400 to 800 nm. This method is straightforward and executable in the ambient environment and at room temperature.
Keywords
II-VI semiconductors; aluminium; electrical resistivity; electrodes; laser beam annealing; nanoparticles; semiconductor thin films; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; AZO nanoparticles; ZnO:Al; pulsed UV laser; pulsed laser annealing; resistivity; resistivity 0.076 ohmcm; transmittance; transparent electrodes; Annealing; Conductivity; Films; Lasers; Nanoparticles; Pulsed laser deposition; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950012
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