• DocumentCode
    2225844
  • Title

    The MURA graphics problems in large area photomask for concept-based data mining techniques

  • Author

    Kao, Wen-hsing ; Hung, Jason C. ; Hsu, Victoria

  • Author_Institution
    Grad. Inst. of Inf. Technol., Overseas Chinese Inst. of Technol., Taichung
  • fYear
    2008
  • fDate
    July 31 2008-Aug. 1 2008
  • Firstpage
    490
  • Lastpage
    495
  • Abstract
    The MURA problems will result lots of problems in photomask and TFT-LCD industries as well. In this paper, we propose a new concept for the photomask production industries, which is based on data mining techniques. Our model is suitable for every company which has the problems in MURA effects. Because our data mining techniques is a way collecting the correct information by itself, it could clean the data through their own expert. By building their own expert data warehouse, it could make our data mining techniques become a optimization mining technique, which means our model is one of the best solution to them. It could be suitable not only for every photomask company but also companies facing to the MURA problems. Our model helps them to cut down their manufacturing cost as well as promote the quality of their products.
  • Keywords
    data mining; data warehouses; electronic engineering computing; expert systems; masks; production engineering computing; semiconductor device manufacture; MURA graphics problems; TFT-LCD industries; concept-based data mining techniques; expert data warehouse; large area photomask; optimization mining technique; photomasks; Data mining; Electron optics; Graphics; Integrated circuit technology; Integrated optics; Lithography; Mining industry; Particle beam optics; Production; Semiconductor device manufacture; Data; Large Photomask; MURA; Mining;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ubi-Media Computing, 2008 First IEEE International Conference on
  • Conference_Location
    Lanzhou
  • Print_ISBN
    978-1-4244-1865-7
  • Electronic_ISBN
    978-1-4244-1866-4
  • Type

    conf

  • DOI
    10.1109/UMEDIA.2008.4570941
  • Filename
    4570941