Title :
Mechanically compliant high contrast grating mirrors for radiation pressure cooling
Author :
Kemiktarak, Utku ; Metcalfe, Michael ; Durand, Mathieu ; Lawall, John
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We have developed micromechanical membranes with high reflectivity and low mass for optical cooling. By patterning silicon nitride membranes with grating structures we have achieved reflectivity of R = 99% and a quality factor of Q = 1.6 × 104.
Keywords :
diffraction gratings; laser cooling; membranes; micro-optomechanical devices; micromirrors; optical fabrication; radiation pressure; reflectivity; silicon compounds; Si3N4; grating structures; micromechanical membranes; optical cooling; quality factor; radiation pressure cooling; reflectivity; silicon nitride membranes; Cavity resonators; Cooling; Mirrors; Optical device fabrication; Optical resonators; Resonant frequency; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
