Title :
2006 international workshop on Nano CMOS proceedings
fDate :
Jan. 30 2006-Feb. 1 2006
Abstract :
The following topics were dealt with: nano-CMOS devices; MOSFETs; high-k gate insulators; spiral inductors; nanoscale transistors; selective dry etching; and SOI transistors.
Keywords :
CMOS integrated circuits; MOSFET; etching; high-k dielectric thin films; inductors; nanoelectronics; silicon-on-insulator; MOSFET; SOI transistors; high-k gate insulators; nanoCMOS devices; nanoscale transistors; selective dry etching; spiral inductors;
Conference_Titel :
Nano CMOS, 2006 International Workshop on
Conference_Location :
Mishima
Print_ISBN :
978-1-4244-0603-6
DOI :
10.1109/IWNC.2006.4570969
