• DocumentCode
    2227794
  • Title

    Research of SI for VHF-devices

  • Author

    Timoshenkov, S.P. ; Minaev, Vladimir S. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.

  • Author_Institution
    Moscow Inst. of Electron. Technol. (Tech. Univ.), Moscow, Russia
  • fYear
    2011
  • fDate
    12-16 Sept. 2011
  • Firstpage
    703
  • Lastpage
    704
  • Abstract
    Results of research of Si for VHF devices are submitted.
  • Keywords
    VHF devices; elemental semiconductors; silicon; Si; VHF devices; silicon; Amorphous silicon; Annealing; Crystals; Films; Minutes; Polymers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4577-0883-1
  • Type

    conf

  • Filename
    6069116
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2227794