DocumentCode :
2227971
Title :
Development of LIGA-fabricated, self-priming, in-line gear pumps
Author :
Dewa, Andrew S. ; Deng, Keren ; Ritter, Darren C. ; Bonham, Charles ; Guckel, Henry ; Massood-Ansari, Sombol
Author_Institution :
MEMStek Products LLC, Vancouver, WA, USA
Volume :
2
fYear :
1997
fDate :
16-19 Jun 1997
Firstpage :
757
Abstract :
This paper reports the development and characterization of the self-priming, magnetically-actuated, two-gear plastic pump which is fabricated by the sacrificial LIGA process. This positive displacement, in-line pump provides a flow rate of 350 μl/min at 5000 rpm, over 140 cm-H2O (~2 psi) of head pressure and 28.8 cm-H2O vacuum on the suction side for a single stage pump. It is the first non-diaphragm, microfabricated pump. A two stage in-line pump generated 533 mm-H2O vacuum at its inlet (21" H2O). This performance demonstrates a viable, microfabricated alternative to syringe pumps and compressed gas for moving fluids in micro-instrumentation
Keywords :
X-ray lithography; electroforming; microactuators; micropumps; 2 psi; flow rate; head pressure; micro-instrumentation; nondiaphragm microfabricated pump; positive displacement in-line pump; sacrificial LIGA process; self-priming magnetically-actuated two-gear plastic pump; single stage pump; two stage in-line pump; vacuum; Fabrication; Gears; Instruments; Magnetic analysis; Magnetic heads; Micromechanical devices; Plastics; Pumps; Seals; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
Type :
conf
DOI :
10.1109/SENSOR.1997.635210
Filename :
635210
Link To Document :
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