Title :
Metallization on the basis of binary and ternary alloys for submicron elements of MEMS RF-microswitches formation
Author :
Chernykh, A.G. ; Tymoshchyk, A.S. ; Kotov, D.A. ; Yasunas, A.A.
Author_Institution :
Belarusian State Univ. of Inf. & Radio Electron., Minsk, Belarus
Abstract :
Features of suspended elements of microme-chanical structures at transition to the submicron size formation are considered. It is shown, that suspended elements of micro-mechanical structures are exposed to the greatest deforming influence during sacrificial layer removing. The ways with the submicron sizes are offered.
Keywords :
deformation; metallisation; microswitches; suspensions; MEMS RF-microswitches; binary alloys; deformation; metallization; micromechanical structure; sacrificial layer removing; submicron element suspension; submicron size formation; ternary alloys; Electronic mail; Etching; Fuses; Informatics; Metallization; Micromechanical devices;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4577-0883-1
