Title :
A quantitative analysis of scratch drive actuation for integrated X/Y motion system
Author :
Langlet, P. ; Collard, D. ; Akiyama, T. ; Fujita, H.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
This paper presents an X/Y stage actuated by scratch drive actuators (SDA) and processed by silicon surface machining. First a quantitative SDA analysis for X/Y motion is presented. The minimum step motion produced by the SDA have been measured as small as 25 nm. Then, feasibility of using SDA for motion of X/Y stage is established. A maximum displacement of 50 μm along X-axis and 40 μm along Y-axis has been demonstrated
Keywords :
electric drives; electrostatic devices; elemental semiconductors; microactuators; motion control; position control; silicon; stepping motors; 25 nm; 40 mum; 50 mum; Si surface machining; X-axis; X/Y stage; Y-axis; electrostatic devices; feasibility; integrated X/Y motion system; maximum displacement; minimum step motion; quantitative analysis; scratch drive actuation; Drives; Electrostatic actuators; Insulation; Insulators; Mirrors; Motion analysis; Pulse measurements; Scanning electron microscopy; Silicon; Springs;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635214
