DocumentCode
2228248
Title
A quantitative analysis of scratch drive actuation for integrated X/Y motion system
Author
Langlet, P. ; Collard, D. ; Akiyama, T. ; Fujita, H.
Author_Institution
Inst. of Ind. Sci., Tokyo Univ., Japan
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
773
Abstract
This paper presents an X/Y stage actuated by scratch drive actuators (SDA) and processed by silicon surface machining. First a quantitative SDA analysis for X/Y motion is presented. The minimum step motion produced by the SDA have been measured as small as 25 nm. Then, feasibility of using SDA for motion of X/Y stage is established. A maximum displacement of 50 μm along X-axis and 40 μm along Y-axis has been demonstrated
Keywords
electric drives; electrostatic devices; elemental semiconductors; microactuators; motion control; position control; silicon; stepping motors; 25 nm; 40 mum; 50 mum; Si surface machining; X-axis; X/Y stage; Y-axis; electrostatic devices; feasibility; integrated X/Y motion system; maximum displacement; minimum step motion; quantitative analysis; scratch drive actuation; Drives; Electrostatic actuators; Insulation; Insulators; Mirrors; Motion analysis; Pulse measurements; Scanning electron microscopy; Silicon; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635214
Filename
635214
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