Title :
A 10-50 GHz micromachined directional coupler
Author :
Robertson, S.V. ; Katehi, L.P.B. ; Rebeiz, G.M.
Author_Institution :
Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A 20 dB directional coupler has been designed and fabricated on a thin dielectric membrane using micromachining techniques. Design of the asymmetric tapered coupled line coupler relies on readily available models and ideal transmission line theory. The use of membrane technology results in less than 0.4 dB insertion loss in the coupler from 10 to 50 GHz. In addition, a micromachined packaging technique creates a shielded circuit which is extremely compact and lightweight.
Keywords :
electromagnetic shielding; membranes; micromachining; microstrip directional couplers; millimetre wave directional couplers; transmission line theory; 0.4 dB; 10 to 50 GHz; EHF; SHF; asymmetric tapered coupled line coupler; insertion loss; micromachined directional coupler; micromachined packaging technique; micromachining techniques; shielded membrane microstrip; thin dielectric membrane; transmission line theory; Biomembranes; Coupling circuits; Dielectric substrates; Directional couplers; Frequency; Impedance; Insertion loss; Packaging; Silicon; Transmission line theory;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.511058
