Title :
Nanoporous silicon combustion process for mems
Author :
Lazarouk, S.K. ; Dolbik, A.V. ; Labunov, V.A.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
Abstract :
Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range of 1-5 mN·s.
Keywords :
combustion; elemental semiconductors; nanofabrication; nanoporous materials; silicon; MEMS; Si; combustion process; jet-propulsion microsystems; nanoporous silicon combustion; nanostructured porous silicon; silicon chip; solid state oxidants; Combustion; Explosions; Hafnium; Ignition; Silicon; Solids;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4577-0883-1
