A large-force, fully-integrated MEMS magnetic actuator

Author

Wright, John A. ; Tai, Yu-Chong ; Chang, Shih-Chia

Author_Institution

California Inst. of Technol., Pasadena, CA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

793

Abstract

A large-force, fully-integrated, electromagnetic actuator for microrelay applications is presented. Designed for high efficiency, the actuator integrates a cantilever beam and planar electromagnetic coil into a low-reluctance magnetic circuit using a combined surface and bulk micromachining process. Experimental testing shows that a coil current of 80 mA generates a 200 μN actuation force. Theoretical extrapolation of the data indicates that an actuation force in the millinewton range can be produced by a coil current of 800 mA. The tested actuators have a footprint of less than 8 mm² and their fabrication is potentially compatible with CMOS processing technology

Keywords

CMOS integrated circuits; coils; magnetic circuits; magnetic switching; microactuators; micromachining; relays; 8 mm; 80 mA; 800 mA; CMOS processing technology; actuation force; cantilever beam; coil current; combined surface/bulk micromachining process; electromagnetic actuator; fabrication; high efficiency; large-force fully-integrated MEMS magnetic actuator; low-reluctance magnetic circuit; microrelay applications; millinewton range; planar electromagnetic coil; Actuators; CMOS technology; Circuit testing; Coils; Electromagnetic forces; Magnetic circuits; Micromachining; Micromechanical devices; Microrelays; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635219

Filename

635219