A magnetic levitation actuator for micro-assembly

Author

Ye, X.Y. ; Huang, Y. ; Zhou, Z.Y. ; Li, Q.C. ; Gong, Q.L.

Author_Institution

Dept. of Precision Instrum., Tsinghua Univ., Beijing, China

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

797

Abstract

The magnetic levitation actuator, which is composed of three layers of silicon structures and a permanent magnet, has been fabricated using micromachining technology and assembled. The top layer consists of a groove and many pairs of small square coils which are used to generate driving forces. The middle layer consists of a groove which composes the moving guide of the permanent magnet with that of top layer. A long rectangle coil is built on the bottom layer, which is used to generate a levitating force. Simulation results show that the magnetic levitation actuator works effectively

Keywords

coils; magnetic levitation; microactuators; microassembling; micromachining; permanent magnets; silicon; Si; bottom layer; driving forces; groove; levitating force; long rectangle coil; magnetic levitation actuator; micro-assembly; micromachining technology; middle layer; moving guide; permanent magnet; silicon structures; simulation results; small square coils; three layers; top layer; Actuators; Coils; Conductors; Magnetic fields; Magnetic levitation; Microactuators; Micromachining; Permanent magnets; Silicon; Superconducting magnets;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635220

Filename

635220