Characteristics of leaky surface acoustic waves propagating along liquid/layered-substrates and their application to liquid sensor

Author

Furukawa, S. ; Nomura, Tadahiro ; Yasuda, Toshiyuki ; Nishimura, Ryota ; Hiramatsu, Toshiyuki ; Tamura, Masato

Author_Institution

Dept. of Comput. Sci. & Electron., Kyushu Inst. of Technol., Fukuoka

fYear

1993

fDate

31 Oct-3 Nov 1993

Firstpage

355

Abstract

We propose SiO₂ (fused silica)/(36°rot.Y-X)LiNbO ₃ substrate for a viscosity sensor, in which the shear horizontal (SH) component becomes larger than that of the case without SiO₂. For glycerin/SiO₂ (40 μm)/LiNbO₃ the loss due to the viscosity of glycerin is four times larger than that for glycerin/LiNbO₃ (30 MHz). Moreover, we show that the SiO₂/(128°rot.Y-X)LiNbO₃ structure is available as a liquid sensor, although the LiNbO₃ substrate (128°rot.Y cut) itself has a small SH component. The origin of the large SH component in the layered substrates is discussed on the basis of the boundary conditions at the interface

Keywords

electric sensing devices; piezoelectric thin films; surface acoustic wave devices; ultrasonic transducers; viscosity measurement; viscosity of liquids; 30 MHz; SiO₂-LiNbO₃; SiO₂/LiNbO₃ substrate; Y-X cut; fused silica; glycerin/SiO₂/LiNbO₃; leaky surface acoustic wave propagation; liquid/layered-substrates; viscosity sensor; Acoustic propagation; Acoustic sensors; Acoustic waves; Boundary conditions; Liquids; Propagation losses; Silicon compounds; Substrates; Surface acoustic waves; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1993. Proceedings., IEEE 1993

Conference_Location

Baltimore, MD

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1993.339469

Filename

339469