Title :
New structure for dc-60 GHz thermal power sensor
Author :
Kodato, S. ; Wakabayashi, Tetsushi ; Zhuang, Q. ; Uchida, S.
Author_Institution :
Anritsu Corp., Kanagawa, Japan
Abstract :
We have developed a new structure thermopile-type thermal power sensor for the millimeter wave range (dc to 60 GHz). It consists of a ceramic substrate, metal and microcrystalline-SiGe thin films. Both fast or high-sensitivity sensors can be manufactured.
Keywords :
millimetre wave detectors; power measurement; thermoelectric devices; thermopiles; 0 to 60 GHz; SiGe; ceramic substrate; metal; microcrystalline SiGe thin film; millimeter wave range; thermal power sensor; thermopile; Electric resistance; Frequency; Millimeter wave measurements; Power measurement; Resistance heating; Sensor phenomena and characterization; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.511076
