Droplet generator with extraordinary high flow rate and wide operating range

This paper describes a piezoelectrically driven micropump for dosing of a broad range of different fluids. It is capable of generating a freely controllable flow of microscopic fluid drops in air from a few 100 pl up to 11.9 ml/min. The ejection velocity of the drops can be varied in a range of 4 to 7 meters per second. The operating principle derived from piezoelectric printing systems, lends itself for building a Paddle Pump by micro technologies. The micropump is characterized by a simple design for cost-effective mass production. As a first application of this micropump an automobile heater with 5 kilowatts peak power output is described. Regarding the performance data of the prototypes presented, a very promising fuel dosing device can be expected for the near future