• DocumentCode
    2229965
  • Title

    Talbot effect: A venerable idea with new applications in nanofabrication

  • Author

    Urbanski, L. ; Wachulak, P. ; Isoyan, A. ; Stein, A. ; Menoni, C.S. ; Rocca, J. ; Marconi, M.

  • Author_Institution
    NSF ERC for Extreme Ultraviolet Sci. & Technol. & Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We describe a coherent nanolithography approach using the Talbot effect in combination with a table top EUV laser emitting at 46.9 nm. The method was used to print large areas of periodic features with nanometer resolution.
  • Keywords
    Talbot effect; laser beam applications; nanofabrication; nanolithography; nanophotonics; Talbot effect; coherent nanolithography; nanofabrication; nanometer resolution; table top EUV laser; wavelength 46.9 nm; Fabrication; Imaging; Laser beams; Measurement by laser beam; Printing; Spatial coherence; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950222
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2229965