Title :
Digital planar holograms fabricated by step and repeat UV nanoimprint lithography: From spectrometer chip to higher power laser diodes
Author :
Peroz, C. ; Dhuey, S. ; Goltsov, A. ; Harteneck, B. ; Ivonin, I. ; Svetikov, V. ; Babin, S. ; Cabrini, S. ; Yankov, V.
Author_Institution :
aBeam Technol., Castro Valley, CA, USA
Abstract :
The fabrication of digital planar holograms by Step and Repeat UV nanoimprint lithography is reported. It opens a route for commercial development of new nanophotonic devices based on digital planar holography. Two first applications to be demonstrated are the high resolution spectrometer chips and the enhancement of brightness and power of laser diodes.
Keywords :
holography; nanolithography; nanophotonics; optical fabrication; semiconductor lasers; soft lithography; ultraviolet lithography; ultraviolet spectrometers; UV nanoimprint lithography; brightness; digital planar holograms; digital planar holography; higher power laser diodes; nanophotonics; spectrometer chip; Brightness; Diode lasers; Holography; Nanoscale devices; Optical device fabrication; Scanning electron microscopy; integrated optics devices; laser; nanofabrication; nanoimprint; spectroscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
