Electromagnetically driven microvalve fabricated in silicon

Author

Meckes, Andreas ; Behrens, Jörg ; Benecke, Wolfgang

Author_Institution

Inst. for Microsensors, Acuators & Syst., Bremen Univ., Germany

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

821

Abstract

This paper reports on a microvalve designed for the use with gaseous media and fabricated in silicon. The focus is on the functional part, the membrane plus valve seat. The membrane to switch the valve between open and closed position is designed having a low spring constant. So only little of the available force is needed for deflection and most of it remains for switching against the load (air pressure). This is shown by FEM simulation (ANSYS 5.2, 5.3). Due to the special design of the valve, packaging as a standalone device as well as full integration into a microsystem is possible

Keywords

electromagnetic devices; electromagnetic forces; encapsulation; finite element analysis; membranes; microactuators; micromachining; semiconductor device packaging; silicon; valves; FEM simulation; Si; Si fabrication; electromagnetically driven microvalve; gaseous media; low spring constant; membrane; microsystem integration; packaging; switching; valve seat; Actuators; Biomembranes; Coils; Electromagnetic forces; Gold; Microvalves; Permanent magnets; Silicon; Switches; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635227

Filename

635227