Title :
A lateral comb-drive structure for energy scavenging
Author :
Nounou, Ahmed ; Ragaie, Hani F.
Author_Institution :
Ain Shams University
Keywords :
CMOS technology; Capacitance; Capacitors; Circuit testing; Fabrication; Micromechanical devices; Power engineering and energy; Power generation; Reservoirs; Voltage;
Conference_Titel :
Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on
Print_ISBN :
0-7803-8575-6
DOI :
10.1109/ICEEC.2004.1374528