Title :
Theoretical and experimental characterization of fully metal coated scanning near-field optical microscopy SiO/sub 2/ tips
Author :
Vaccaro, L. ; Aeschimann, L. ; Akiyama, T. ; Eckert, R. ; Heinzelmann, H. ; de Rooij, N.F. ; Staufer, U. ; Herzig, H.P.
Author_Institution :
Group of Appl. Opt. Inst. of Microtechnology, Neuchatel Univ., Switzerland
Abstract :
In spite of the considerable progress achieved in fabricating scanning near-field optical microscopy (SNOM) probes, the process to prepare smooth tip surfaces with aperture sizes under 100 nm is still expensive and time consuming. Recently, silicon cantilever-based SNOM probes with aluminum-coated quartz (fused silica) tips have been batch fabricated using micro machining technology. The tip apex is fully covered with a metal layer in the range of 60 nm thickness. It is the objective of this work to theoretically and experimentally elucidate the mechanism responsible for the light transmission through these novel probes.
Keywords :
near-field scanning optical microscopy; silicon compounds; Al; SiO/sub 2/; aluminum coating; batch fabrication; fused silica tip; light transmission; metal coated SiO/sub 2/ tip; micromachining technology; quartz tip; scanning near-field optical microscopy; silicon cantilever; Apertures; Coatings; Helium; Machining; Optical microscopy; Optical polarization; Optical scattering; Optical surface waves; Probes; Silicon compounds;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031417