• DocumentCode
    2230524
  • Title

    A MEMS gimbal scanner for a miniature confocal microscope

  • Author

    Murakami, K. ; Kamiya, Y. ; Karatsu, K. ; Miyajima, H. ; Katashiro, M.

  • Author_Institution
    Olympus Opt. Co. Ltd., Tokyo, Japan
  • fYear
    2002
  • fDate
    20-23 Aug. 2002
  • Firstpage
    9
  • Lastpage
    10
  • Abstract
    We have developed an electrostatic gimbal scanner for a unique miniature confocal microscope. The mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. 12 deg. scan angle and 80 nm (PV) mirror flatness are achieved.
  • Keywords
    Q-factor; micro-optics; micromirrors; optical microscopes; optical scanners; MEMS gimbal scanner; Q-factor; SiN; electrostatic gimbal scanner; miniature confocal microscope; mirror flatness; stress-controlled silicon nitride; Electrostatics; Fasteners; Lenses; Light sources; Micromechanical devices; Mirrors; Optical fibers; Optical microscopy; Silicon; Stress control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
  • Conference_Location
    Lugano, Switzerland
  • Print_ISBN
    0-7803-7595-5
  • Type

    conf

  • DOI
    10.1109/OMEMS.2002.1031418
  • Filename
    1031418
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2230524