Title :
Bulk micromachined 2D lens scanners for transparent optical fiber switches
Author :
Saruta, K. ; Fujita, H. ; Toshiyoshi, H.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Japan
Abstract :
As an alternative approach of constructing 3D MEMS optical crossconnectors; (OXC), we propose bulk micromachined electrostatic 2D lens-scanner arrays instead of tilting mirrors. Having carefully investigated the optical and mechanical designs of MEMS OXC, we have concluded that collimator lenses have the most significant influence upon the optomechanical switching performance.
Keywords :
microlenses; micromachining; optical arrays; optical fibres; optical scanners; optical switches; transparency; 3D MEMS optical cross-connector; bulk micromachining; collimator lens; electrostatic 2D lens scanner array; mechanical design; optical design; optomechanical switching; transparent optical fiber switch; Electrostatics; Lenses; Micromechanical devices; Microoptics; Optical arrays; Optical collimators; Optical design; Optical fibers; Optical filters; Silicon;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031420
