Title :
Capacity planning for development wafer fab expansion
Author :
Chou, William ; Everton, John
Author_Institution :
Fujitsu Comput. Packaging Technol. Inc., San Jose, CA, USA
Abstract :
The simulation model described offers many different opportunities for increasing understanding of a development wafer fab. The results of simulation runs must be analyzed with an understanding of the effect of randomness on the model. Multiple random number runs might be required to confirm a model result. Simulation models can account for dynamic interactions between wafers, tools and operators. The variety of statistics can be used to better understand and interpret the model results. Simulation provides the benefit of experimenting with the fab without buying equipment. In the case of Fujitsu, production volumes were increasing. The model provided information on staffing requirements and new tool acquisitions required to support higher levels of production
Keywords :
digital simulation; integrated circuit manufacture; masks; semiconductor process modelling; Fujitsu; capacity planning; development wafer fab expansion; dynamic interactions; multiple random number runs; production volumes; randomness; simulation model; staffing requirements; tool acquisitions; Capacity planning; Computer aided manufacturing; Electronics industry; Manufacturing processes; Production; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device packaging; Throughput; Time measurement;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-3371-3
DOI :
10.1109/ASMC.1996.557964
