Title :
Design for reliability of high voltage, high density interconnects for MOEMS mirror drive electrodes
Author :
Jazairy, A. ; Smith, J.H. ; Nasiri, S.S. ; Bryzek, J. ; Flannery, A.F. ; Novack, M.J. ; Sprague, R. ; Skurnik, D.
Author_Institution :
Transparent Networks Inc., Santa Clara, CA, USA
Abstract :
Reports on the design of high density interconnects for direct-drive electrodes in a 1200 mirror array. We analyze reliability issues for this passive approach and demonstrate the promise of an active, integrated solution.
Keywords :
microelectrodes; micromirrors; semiconductor device metallisation; semiconductor device reliability; MOEMS mirror; active integrated solution; design for reliability; direct-drive electrodes; high density interconnects; Application specific integrated circuits; CMOS technology; Crosstalk; Electrodes; Metallization; Mirrors; Nonhomogeneous media; Optical design; Optical switches; Voltage;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031423
