Title :
On the monte carlo simulation of optical MEMS components
Author :
Badreldin, Tarek ; Saad, Tamer ; Khalil, Diaa
Author_Institution :
Ain Shams University
Keywords :
Assembly; Micromechanical devices; Optical attenuators; Optical design; Optical design techniques; Optical devices; Optical filters; Optical sensors; Optical switches; Process design;
Conference_Titel :
Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on
Print_ISBN :
0-7803-8575-6
DOI :
10.1109/ICEEC.2004.1374553
