Title :
Giant wavelength-temperature dependence of VCSEL with thermally actuated cantilever structure
Author :
Nakahama, Masanori ; Sano, Hayato ; Nakata, Norihiko ; Matsutani, Akihiro ; Koyama, Fumio
Author_Institution :
Photonics Integration Syst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We present the modeling and the experimental result of a micro-machined VCSEL with a thermally actuated semiconductor/SiO2 cantilever structure. The modeling result shows a giant wavelength-temperature dependence of over 3.5 nm/K. The fabricated device exhibits a temperature dependence of 0.79 nm/K, which is 10 times larger than that of conventional VCSELs.
Keywords :
III-V semiconductors; aluminium compounds; cantilevers; gallium arsenide; quantum well lasers; surface emitting lasers; thermo-optical devices; GaAs-AlGaAs; SiO2; VCSEL; micromachining; temperature dependence; thermal actuator; thermally actuated cantilever structure; Distributed Bragg reflectors; Laser tuning; Temperature dependence; Temperature measurement; Thermal stresses; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
