DocumentCode
2230780
Title
Characterization of a micro optical distance sensor
Author
Wallrabe, U. ; Hollenbach, U. ; Krippner, P. ; Mohr, J. ; Oka, T.
Author_Institution
Inst. for Microstructure Technol. (IMT), Forschungszentrum Karlsruhe GmbH (FZK), Germany
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
29
Lastpage
30
Abstract
A micro optical distance sensor with a PSD receiver built in a modular set-up using two planar chips has been characterized. Results from spot size, measurement range, linearity, resolution, and repeatability are described.
Keywords
distance measurement; micro-optics; microsensors; modules; optical sensors; PSD receiver; linearity; measurement range; micro optical distance sensor; modular set-up; planar chips; position sensitive detector; repeatability; resolution; spot size; Lenses; Linearity; Microstructure; Mirrors; Optical receivers; Optical scattering; Optical sensors; Semiconductor device measurement; Sensor phenomena and characterization; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031428
Filename
1031428
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