Title :
Characterization of a micro optical distance sensor
Author :
Wallrabe, U. ; Hollenbach, U. ; Krippner, P. ; Mohr, J. ; Oka, T.
Author_Institution :
Inst. for Microstructure Technol. (IMT), Forschungszentrum Karlsruhe GmbH (FZK), Germany
Abstract :
A micro optical distance sensor with a PSD receiver built in a modular set-up using two planar chips has been characterized. Results from spot size, measurement range, linearity, resolution, and repeatability are described.
Keywords :
distance measurement; micro-optics; microsensors; modules; optical sensors; PSD receiver; linearity; measurement range; micro optical distance sensor; modular set-up; planar chips; position sensitive detector; repeatability; resolution; spot size; Lenses; Linearity; Microstructure; Mirrors; Optical receivers; Optical scattering; Optical sensors; Semiconductor device measurement; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031428
