DocumentCode
2230877
Title
Real time, software control of spring suspended micro-electro-mechanical (MEM) devices for precision optical positioning applications
Author
Madanagopal, K.V. ; D´Andrea, R. ; Tien, N.C.
Author_Institution
Bio-technology Dept., Cornell Univ., Ithaca, NY, USA
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
41
Lastpage
42
Abstract
We report on the development of an instrumentation and control suite to perform closed loop, real time position control of spring suspended micro-electro-mechanical (MEM) devices. Software control of the MEM device compensates for any parameter variations that occur during processing and ensures device functionality.
Keywords
closed loop systems; micro-optics; optical control; position control; real-time systems; closed-loop real-time software control; microelectromechanical device; optical positioning; spring suspension; Actuators; Application software; Computer errors; Damping; Error correction; Feedback; Fingers; Force control; Hardware; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031433
Filename
1031433
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