Title :
Control of second order temperature coefficient of SAW propagating in two thin film layers
Author :
Nakagawa, Yukihiro
Author_Institution :
Fac. of Eng., Yamanashi Univ., Kofu
fDate :
31 Oct-3 Nov 1993
Abstract :
This study proposes a new control method of the 1st- and 2nd-order temperature coefficients of two-layer substrate composed of ZnO and Ta 2O5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. As a result, a stable SAW substrate of ZnO/Ta2O5 /fused quartz showing the 3rd-order characteristics was developed
Keywords :
II-VI semiconductors; piezoelectric semiconductors; piezoelectric thin films; surface acoustic wave devices; surface acoustic waves; tantalum compounds; temperature control; ultrasonic velocity; zinc compounds; SAW propagation; Ta2O5; ZnO; ZnO-Ta2O5-SiO2; ZnO/Ta2O5/fused quartz; control method; first order temperature coefficient; second order temperature coefficient; semiconductor; thin film layers; third order temperature coefficient; two-layer substrate; Delay effects; Equations; Glass; Propagation delay; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature control; Transistors; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339570
