• DocumentCode
    2230923
  • Title

    Control of second order temperature coefficient of SAW propagating in two thin film layers

  • Author

    Nakagawa, Yukihiro

  • Author_Institution
    Fac. of Eng., Yamanashi Univ., Kofu
  • fYear
    1993
  • fDate
    31 Oct-3 Nov 1993
  • Firstpage
    287
  • Abstract
    This study proposes a new control method of the 1st- and 2nd-order temperature coefficients of two-layer substrate composed of ZnO and Ta 2O5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. As a result, a stable SAW substrate of ZnO/Ta2O5 /fused quartz showing the 3rd-order characteristics was developed
  • Keywords
    II-VI semiconductors; piezoelectric semiconductors; piezoelectric thin films; surface acoustic wave devices; surface acoustic waves; tantalum compounds; temperature control; ultrasonic velocity; zinc compounds; SAW propagation; Ta2O5; ZnO; ZnO-Ta2O5-SiO2; ZnO/Ta2O5/fused quartz; control method; first order temperature coefficient; second order temperature coefficient; semiconductor; thin film layers; third order temperature coefficient; two-layer substrate; Delay effects; Equations; Glass; Propagation delay; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature control; Transistors; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    0-7803-2012-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1993.339570
  • Filename
    339570
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2230923