Title :
Application of fluorinated copolyimides on surface acoustic wave devices
Author :
Komine, Kazuteru ; Araki, Nozomu ; Hohkawa, Kohji
Author_Institution :
Meidensha Corp., Tokyo
fDate :
31 Oct-3 Nov 1993
Abstract :
This paper presents the effectiveness and problems of fluorinated polyimides for SAW device applications such as passivation, frequency trimming, spurious wave dumping, interlayer dielectrics and acousto-optic integration. We have shown basic experimental results for device processes and some application results such as frequency trimming, formation of passive circuit elements, and multilayered devices
Keywords :
acoustic materials; acoustic resonators; acousto-optical devices; materials preparation; passivation; polymer films; surface acoustic wave devices; surface acoustic wave filters; SAW device applications; acousto-optic integration; fluorinated copolyimides; frequency trimming; interlayer dielectrics; multilayered devices; passivation; passive circuit elements; spurious wave dumping; surface acoustic wave devices; Acoustic waves; Dielectric constant; Frequency; Optical devices; Optical materials; Optical refraction; Optical variables control; Polyimides; Surface acoustic wave devices; Thermal expansion;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339577
