DocumentCode
2231080
Title
Application of fluorinated copolyimides on surface acoustic wave devices
Author
Komine, Kazuteru ; Araki, Nozomu ; Hohkawa, Kohji
Author_Institution
Meidensha Corp., Tokyo
fYear
1993
fDate
31 Oct-3 Nov 1993
Firstpage
253
Abstract
This paper presents the effectiveness and problems of fluorinated polyimides for SAW device applications such as passivation, frequency trimming, spurious wave dumping, interlayer dielectrics and acousto-optic integration. We have shown basic experimental results for device processes and some application results such as frequency trimming, formation of passive circuit elements, and multilayered devices
Keywords
acoustic materials; acoustic resonators; acousto-optical devices; materials preparation; passivation; polymer films; surface acoustic wave devices; surface acoustic wave filters; SAW device applications; acousto-optic integration; fluorinated copolyimides; frequency trimming; interlayer dielectrics; multilayered devices; passivation; passive circuit elements; spurious wave dumping; surface acoustic wave devices; Acoustic waves; Dielectric constant; Frequency; Optical devices; Optical materials; Optical refraction; Optical variables control; Polyimides; Surface acoustic wave devices; Thermal expansion;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location
Baltimore, MD
Print_ISBN
0-7803-2012-3
Type
conf
DOI
10.1109/ULTSYM.1993.339577
Filename
339577
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