DocumentCode
2231125
Title
A large out-of-plane motion mechanism for optical applications
Author
Tsai, J.M. ; Chien Cheng Chu ; Jerwei Hsieh ; Weileun Fang
Author_Institution
Power Mech. Eng, Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
59
Lastpage
60
Abstract
Utilizing the high aspect ratio process on [111] Si substrate (BELST process), a large out-of-plane motion actuator that can be applied for MOEMS has been developed. In this design, the combination of vertical comb and robust leverage are exploited to provide an extremely large out-of-plane motion. Moreover, the thickness of the twin-beams torsional bar can also be trimmed to reduce the driving voltage.
Keywords
micro-optics; microactuators; BELST process; MOEMS; Si; Si[111] substrate; driving voltage; high aspect ratio process; large out-of-plane motion actuator; optical applications; twin-beam torsional bar; vertical comb; Drives; Electrodes; Electrostatic actuators; Micromechanical devices; Mirrors; Numerical analysis; Optical switches; Robustness; Ultraviolet sources; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031442
Filename
1031442
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