Title :
Microfluidic motion generation with loosely-focused acoustic waves
Author :
Zhu, Xu ; Kim, Eun Sok
Author_Institution :
Dept. of Electr. Eng., Hawaii Univ., Honolulu, HI, USA
Abstract :
This paper presents a novel approach for producing microfluidic motions by loosely-focused acoustic waves (generated by a piezoelectric ZnO thin film). Results show that the acoustic-waves generated by RF sources, with frequencies corresponding to thickness-mode resonances of the piezoelectric film, are very effective in moving liquid around when the waves are loosely focused. The device operates without any significant temperature increase in the liquid, and will be very attractive for mixing or transporting temperature-sensitive fluids
Keywords :
flow control; fluidics; mixing; piezoelectric transducers; ultrasonic effects; ultrasonic focusing; ultrasonic transducers; 100 to 400 MHz; RF sources; ZnO; acoustic beam transducer; acoustic wave generation; loosely-focused acoustic waves; microfluidic motion generation; mixing; piezoelectric ZnO thin film; temperature-sensitive fluid transport; thickness-mode resonances; Acoustic transducers; Acoustic waves; Electrodes; Fabrication; Microfluidics; Optical films; Optical surface waves; Piezoelectric films; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635231
