Title :
Toward flexible wafer-size 3D photonic crystal templates fabricated by scanning holographic lithography
Author :
Liang Yuan ; Herman, P.R.
Author_Institution :
Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
Parallel linear scanning laser exposure of diffractive optical elements is engineered to produce seamless stitching of thick 3D photonic crystal templates over large area and offer bandgap tuning, chirping, apodization and optofluidic integration.
Keywords :
diffractive optical elements; holography; lithography; optical fabrication; optical tuning; photonic crystals; apodization; bandgap tuning; chirping; diffractive optical elements; flexible wafer-size 3D photonic crystal templates; optofluidic integration; parallel linear scanning laser; scanning holographic lithography; seamless stitching; Holography; Interference; Laser beams; Lithography; Optical device fabrication; Three dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
