DocumentCode
2231252
Title
Toward flexible wafer-size 3D photonic crystal templates fabricated by scanning holographic lithography
Author
Liang Yuan ; Herman, P.R.
Author_Institution
Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
Parallel linear scanning laser exposure of diffractive optical elements is engineered to produce seamless stitching of thick 3D photonic crystal templates over large area and offer bandgap tuning, chirping, apodization and optofluidic integration.
Keywords
diffractive optical elements; holography; lithography; optical fabrication; optical tuning; photonic crystals; apodization; bandgap tuning; chirping; diffractive optical elements; flexible wafer-size 3D photonic crystal templates; optofluidic integration; parallel linear scanning laser; scanning holographic lithography; seamless stitching; Holography; Interference; Laser beams; Lithography; Optical device fabrication; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950274
Link To Document