Title :
Microlens fabrication by the modified LIGA process and its modeling and analysis
Author :
Sung-Keun Lee ; Dong Sung Kim ; Sang Sik Yang ; Lee, S.S. ; Tai Hun Kwon
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Abstract :
A microlens and microlens arrays is realized using a novel fabrication technology based on exposure of a resist, usually PMMA (Polymethylmethacrylate), to deep X-rays and subsequent thermal treatment. Moreover, a prediction model for microlens formation is presented. A simple analysis based on the new model is applied to predict maximum heights of the microlens which depend on the thermal treatment.
Keywords :
LIGA; heat treatment; microlenses; optical fabrication; PMMA resist; analytical model; deep X-ray lithography; fabrication technology; microlens; microlens arrays; modified LIGA process; thermal treatment; Glass; Lenses; Microoptics; Optical device fabrication; Optical devices; Polymers; Predictive models; Shape; Temperature; X-rays;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031451
