DocumentCode
2231323
Title
Fab of the Future
Author
Art, David ; O´Halloran, M.
Author_Institution
Industrial Design Corporation, Oregon
fYear
1993
fDate
18-19 Oct 1993
Firstpage
4
Lastpage
4
Keywords
Art; Buildings; Construction industry; Manufacturing automation; Production facilities; Rails; Robotics and automation; Safety; Semiconductor device manufacture; Slabs;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682467
Filename
682467
Link To Document