Tilting out-of-plane platform for optical applications

Author

Overstolz, T. ; Clerc, P.-A. ; Gale, M.T. ; Herzig, H.P. ; Niederer, G. ; Noell, W. ; Sochtig, J. ; Thiele, H. ; de Rooij, N.F.

Author_Institution

Inst. of Microtechnology, Neuchatel Univ., Switzerland

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

81

Lastpage

82

Abstract

In this paper we present a novel concept for a tiltable optical platform. The platform is electrostatically actuated using two vertical comb drives that run through the whole thickness of the wafer causing out-of-plane deflection. The platform measures 2/spl times/2 mm/sup 2/ with a through-hole of 1.6/spl times/1.8 mm/sup 2/. For a first demonstrator an optical filter showing an angular dependency of the reflected wavelength will be glued onto the platform in order to act as a channel add/drop device for telecom applications.

Keywords

electrostatic actuators; micro-optics; optical filters; channel add/drop device; electrostatic actuation; optical filter; out-of-plane deflection; through-hole; tiltable optical platform; vertical comb drive; Actuators; Electrostatic measurements; Gratings; Optical devices; Optical filters; Optical reflection; Resonance; Telecommunications; Voltage; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031453

Filename

1031453