Galvanometric silicon scanning mirror of 2 DOF

Author

Si-Hong Ahn ; Yong-Kweon Kim

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

87

Lastpage

88

Abstract

A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.

Keywords

elemental semiconductors; micromirrors; optical scanners; silicon; 130 mA; 150 Hz; 30 mA; 380 Hz; AC current; Lorentz force; Si; galvanometric silicon scanning mirror; magnetic field; movable frame; optical MEMS; permanent magnet; resonance mode; rotation angle; torque; two-degree-of-freedom device; Aluminum; Lorentz covariance; Magnetic fields; Magnetic resonance; Mirrors; Optical polymers; Permanent magnets; Silicon; Springs; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031456

Filename

1031456