DocumentCode :
2231420
Title :
Low voltage PZT actuated tilting micromirror with hinge structure
Author :
Hyo-Jin Nam ; Young-Sik Kim ; Seong-Moon Cho ; Yougjoo Yee ; Jong-Uk Bu
Author_Institution :
Microsystem Group, LG Electron. Inst. of Technol., Seoul, South Korea
fYear :
2002
fDate :
20-23 Aug. 2002
Firstpage :
89
Lastpage :
90
Abstract :
In this paper, a bulk micromachined PZT micromirror with low voltage operation, large tilting angle, and two-axes degree of freedom is discussed for optical applications. The micromirror is connected to PZT cantilevers by hinge structure to minimize mechanical constraint. The maximum tilting angle of the fabricated micromirror is 3.5/spl deg/ at low voltage of 40 V.
Keywords :
lead compounds; low-power electronics; microactuators; micromachining; micromirrors; piezoelectric actuators; 40 V; PZT; PZT cantilever actuator; PbZrO3TiO3; bulk micromachining; hinge structure; low voltage operation; micromirror; optical applications; tilting angle; two-axes degree of freedom; Displays; Electrostatic actuators; Etching; Fasteners; Laboratories; Linearity; Low voltage; Micromirrors; Optical device fabrication; Optical switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
Type :
conf
DOI :
10.1109/OMEMS.2002.1031457
Filename :
1031457
Link To Document :
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