Commercial vision of silicon based inertial sensors

This paper reviews recent R&D and commercial status of inertial sensors using silicon micromachining technologies and discusses the requirements for commercialization of the research results. Successful commercial implantation requires involvement at the design, process, manufacturing, applications so that low cost, reliability, and better performance can be achieved. It is also necessary to have a clear understanding of the market and IC mentality. The paper forecasts the potential applications and future market of the silicon based inertial sensors