Commercial vision of silicon based inertial sensors

Author

Song, Cimoo

Author_Institution

Microsyst. Lab., Samsung Adv. Inst. of Technol., Suwon, South Korea

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

839

Abstract

This paper reviews recent R&D and commercial status of inertial sensors using silicon micromachining technologies and discusses the requirements for commercialization of the research results. Successful commercial implantation requires involvement at the design, process, manufacturing, applications so that low cost, reliability, and better performance can be achieved. It is also necessary to have a clear understanding of the market and IC mentality. The paper forecasts the potential applications and future market of the silicon based inertial sensors

Keywords

accelerometers; automotive electronics; electric sensing devices; elemental semiconductors; gyroscopes; inertial navigation; integrated circuit technology; microsensors; silicon; technological forecasting; Si; Si inertial sensors; Si micromachining; applications; automobiles; commercial status; cost; implantation; industrial applications; market; medical applications; military applications; performance; reliability; Accelerometers; Commercialization; Costs; Force feedback; Mechanical sensors; Micromachining; Micromechanical devices; Motion control; Research and development; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635232

Filename

635232