DocumentCode :
2231429
Title :
Microelectronics Manufacturing Education
Author :
Fuller, L.F. ; Pearson, R.E. ; Turkman, I.R. ; Kurinec, S.K. ; Lane, R.L. ; Jackson, M.A. ; Smith, B.W.
Author_Institution :
Rochester Institute of Technology Microelectronic Engineering, NY
fYear :
1993
fDate :
18-19 Oct 1993
Firstpage :
26
Lastpage :
33
Keywords :
Circuits; Educational institutions; Educational programs; Fabrication; Laboratories; Manufacturing processes; Materials science and technology; Microelectronics; Semiconductor device manufacture; Semiconductor devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type :
conf
DOI :
10.1109/ASMC.1993.682473
Filename :
682473
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2231429
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