Title :
Comparative study of electrostatically actuated torsion micromirrors: design parameters and performance
Author :
Bochobza-Degani, O. ; Feldman, S. ; Nemirovsky, Y.
Author_Institution :
Electr. Eng. Dept., Kidron Microelectron. Res. Center, Haifa, Israel
Abstract :
This paper will systematically compare the measured results of electrostatic torsion micromirrors with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology, achieving extended travel range and minimizing the applied voltage required for their operation.
Keywords :
electrostatic actuators; micromirrors; torsion; design parameters; electrostatic actuation; optical MEMS; torsion micromirror; Actuators; Displacement measurement; Electrodes; Electrostatic measurements; Instruments; Micromirrors; Optical devices; Semiconductor device modeling; Shape measurement; Voltage;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031458
