Title :
Technical Feasibility of Self Directed Work Team Concept in Supervisorless Semiconductor Fabrication Environment Using CIM Based Real-Time Productivity Monitors
Author_Institution :
VJ Associates, CA
Keywords :
Fabrication; Law; Legal factors; Monitoring; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682475